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Nano fabrication (Semiconductor fabrication clean room facility)

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120 governors drive, Conte B112

Conte B112

Amherst MA Hampshire, MA 01003

United States

https://www.umass.edu/ials/core-facilities/nanofabrication-cleanroom

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Primary Contact:

Gohmyeong Bae

0009-0004-3938-0765

Facility Details

Located on the 1st floor in the Silvio O. Conte National Center for Polymer Research the Nanofabrication facility is part of a network of cleanroom laboratories that offer both unique and complimentary capabilities. Training can be tailored to the specific set of processes or techniques needed to fabricate and test various devices or materials. Films of numerous metals and ceramics can be applied and patterning as small as 10 nm can be accomplished. A wet chemistry area provides a safe environment for the use of a variety of coatings, solvents, and etchants.

Facility Policies

Services are not offerred outside of

Consulting is not offerred outside of University of Massachusetts Amherst

Last Updated: 09/02/2026